Iyi ngingo ikubiyemo ibipimo ngenderwaho byerekana imikorere ya PTFE yubushyuhe bwo hejuru ikoreshwa mu gutwikira vacuum, kuvura ubushyuhe bwa vacuum hamwe n’ibidukikije bisa. Ibisabwa byingenzi biratandukanye cyane nikoreshwa ryikirere: gusohora ni ngombwa cyane (TML≤1%, CVCM≤0.1%; amanota yo mu kirere / optique bisaba TML≤0.5%, CVCM≤0.01%); ubushyuhe bwo kurwanya ubushyuhe bugomba kugenzurwa kuri substrate ya PTFE (260 ° C) hamwe nigiti gifatika; byumwihariko wasukuwe cyane silicone ya silicone PSA irasabwa gukumira siloxane; ubushyuhe bwo hejuru bufata imbaraga birinda kunyerera no guterura inkombe; isuku isaba nta fibre yamenetse hamwe nibirimo ionic; kaseti irwanya static (irwanya ubuso 10⁶-10⁹ Ω / sq) irinda kwangirika kwa ESD; plasma irwanya igomba gusuzumwa kubikorwa / PECVD; kugabanuka k'ubushyuhe munsi ya 2% byemeza ko masking itomoye.

Iyi ngingo igereranya icyumba-ubushyuhe nubushyuhe bwo hejuru bwo gukura kwa silicone yumuvuduko ukabije wa kaseti ya PTFE. Gukura k'ubushyuhe bwo hejuru (120-180 ° C) bituma habaho imiyoboro ihuza imiyoboro ifite imbaraga zifatika, ikarinda ibisigazwa bifata nyuma yo kuyikuramo. Ikora imiti ihuza imiti hamwe na PTFE ikoresheje primer co-curing, ikuraho ingaruka zo gusiba. Gukura k'ubushyuhe bwo hejuru kandi bikuraho imbaraga za molekile nkeya mbere yo kubyara, bikarinda amavuta menshi ya silicone mugihe cyo gushyushya bwa mbere.

Aka gatabo karimo PTFE yubushyuhe bwo hejuru bwo gutoranya kaseti yo gutera inshinge no kurwanya anti-stick. Guhitamo bishingiye ku bushyuhe: 60260 ° C kuri plastiki rusange (kaseti ya silicone isanzwe ya PSA, 0.13-0.18mm); 260-300 ° C kuri plastiki yubushyuhe bwo hejuru yubushakashatsi nka PC, PA66, POM (yometse hejuru ya tempic silicone, 0.18-0.25mm); 300-400 ° C kuri PEEK, LCP, PPS hafi yiruka ashyushye (kaseti ifata birananirana; koresha umwenda wa PTFE udafite amavuta cyangwa firime ya PFA). Guhitamo bishingiye ku bikoresho: ibikoresho byoroshye bikenera-kurekura hejuru ya PTFE yuzuye; ibirahuri / minerval yuzuye ibikoresho bisaba uburemere-0.25mm + kaseti idashobora kwambara; inyongeramusaruro yangiza isaba imiti irwanya imiti hamwe nubutaka bwuzuye; porogaramu ihamye-ikenera anti-static umukara PTFE kaseti.

Imyenda ya PTFE isize fiberglass ikoreshwa cyane mugutunganya reberi kugirango irwanye ubushyuhe bwayo, ibintu bidafite inkoni, hamwe no guterana amagambo. Ibyingenzi byingenzi birimo: kurekura imirongo ya plate / vacuum vulcanisation no kubumba amapine; imikandara ya convoyeur idakoreshwa kumasyo ifunguye, kalendari, n'imirongo ikonjesha; guhuza imyenda yo kubika igice cyarangije kubikwa; uburyo bwihariye bwo gukora silicone na fluororubber; n'itanura ry'itanura ryo gukira. Inyungu zirimo gukuraho ifumbire mvaruganda, kugabanya imikoreshereze yabashinzwe kurekura, kwirinda kuzinga, no kwemeza neza.

PTFE kaseti ya miyoboro / imiyoboro irwanya ruswa, idafite inkoni, hamwe no kurinda kashe bisaba guhuza substrate, sisitemu yo gufatira hamwe, hamwe nibitangazamakuru byimiti. Silicone PSA irasabwa 200-260 ° C hamwe na acide / alkalis; acrylic PSA irwanya ibishishwa kama ariko igabanya ubushyuhe kuri ≤150 ° C. Kuri HF, guteka> 80% alkali, cyangwa chlorine trifluoride, koresha umurongo wa PTFE gusa (nta gufatira kama). Icyitonderwa: ibifatika ni ihuriro ridakomeye, ntabwo PTFE ubwayo.

PTFE kaseti ifata imbaraga itezimbere hakoreshejwe gutwikira no gukiza inzira nziza. Igipfundikizo: primer layer (0.5-2μm silane primer irinda gukuramo ibishishwa), uburebure bwa 30-60 mm (byiza gufata imbaraga), kwanduza vacuum, no kuyungurura 5-10 mm. Gukiza: gushyushya intambwe (80-100 ° C gukuramo ibishishwa → 120-140 ° C gushiraho → 150-220 ° C guhuza byimbitse), gukira nyuma (40-60 ° C kuri 24-48h kugirango ugabanye imihangayiko), hamwe no gutwarwa nubushyuhe buke kugirango wirinde guhangayika imbere kugabanuka. Primer ningirakamaro kububasha buke bwa PTFE.

PTFE yubushyuhe bwo hejuru ikora nkibikoresho byingenzi mubikorwa bya semiconductor, ntabwo ari intego rusange ikoreshwa. Porogaramu zingenzi: kurinda urwego rwa wafer (mask ya plasma etching, kurinda inyuma ya CMP, guhisha inyuma ya CVD / PVD), uburyo bwo gupakira (gukosora insinga, kugurisha masike ya PCBs), no gufata neza ibikoresho (gufunga anti-static roller, gupfunyika isuku). Ibisabwa cyane-bisukuye: halogene nkeya (irinda kwangirika kwangirika), siloxane nkeya (<500 ppm, irinda insuline yibice), ion nkeya yicyuma (<1 ppm buri umwe), ISO yo mu cyiciro cya 4 cyogusukura / gupakira, 10⁶-10⁹ resist kurwanya ubukana bwa TVOC.

Icyiciro cyubuvuzi PTFE yubushyuhe bwo hejuru ikomatanya biocompatible PTFE substrate hamwe na platine yakize ya silicone. Ibyingenzi byingenzi: ISO 10993 yubahiriza (nta cytotoxicity, sensibilisation, cyangwa kurakara), irwanya sterisizasiya inshuro nyinshi (steam / EO / gamma), 260 ° C irwanya ubushyuhe. Icyitonderwa gikomeye: nturenze 260 ° C (umwotsi wuburozi uri hejuru ya 300 ° C), imirasire ya gamma irashobora gutera uburibwe, kwemeza uburyo bwo kuboneza urubyaro, no gusaba ibyangombwa byuzuye (raporo ya ISO 10993, MSDS, amakuru ashaje). Ntabwo ari kumaraso ataziguye cyangwa gukoreshwa keretse byemejwe neza.

Gukoresha kaseti ya PTFE biterwa nimpamvu enye: gushiraho ifatizo (ubwinshi bwambukiranya imipaka, kwimuka kwa silicone nkeya, imiterere ya microphase kugirango isubirwemo), substrate anchoring (surface activation + primer kugirango wirinde kwimura neza), gutwikira inyuma (kurekura ibice kugirango urinde ibifata mugihe utabishaka), hamwe no gufata neza (hejuru yubushuhe bukwiye). Amazi yogejwe n'amazi yahinduwe arashobora gukira> 90% tack nyuma yo gukora isuku.

Ubushuhe bwagutse bwa PTFE kaseti isaba silicone PSA ikomeza gufatana kuva kuri 70 ° C kugeza 260 ° C. Ibintu by'ingenzi byashushanyijeho: primer-anchored layer layer (irinda gusiba), microstructure yo mu kirwa cyo mu nyanja (MQ resin birwa + polysiloxane ikomeza icyiciro), guhuza buhoro buhoro (urwego rwimbere rwimbere rwo guhangana n’ibikururuka, urwego ruciriritse rwo hasi rwihuta), hamwe nuzuza ubushyuhe (okiside ya cerium). Ibice bya fenyl byahinduwe na siloxane birwanya ubushyuhe buke bwo korohereza ibintu, bigafasha guhinduka munsi ya 100 ° C.